Design variables are optimized so that they satisfy the requirements of high resolution, long working range, high response speed, and compact size. 2-Axis piezo scanners for small loads are frequently used for scanning and tracking processes. Repeatable, drift-free positioning with optimal stability is possible by the use of high-quality nanometrology sensors. ![]() The latest generation of digital controllers, also further enhances the bandwidth, linearity, and the position stability as well as step-and-settle times. The proposed XY- scanner is actuated with the help of voice coil motor (VCM) and double compound linear spring flexure guide mechanism. High-precision 2-axis nanopositioning systems integrate PICMA ® piezo actuators for maximum reliability. Most of PI's XY piezo stages are equipped with an ID chip that contains calibration data for the digital piezo controller, allowing stage an controller to be swapped in the field without the need for recalibration. Stacked or nested X-Y stage axis designs are also available – they trade the flexibility of modularity with the added inertia/height and lower dynamic performance.įrictionless XY-Motion with Nanometer Precisionĭue to the frictionless design of drive system (solid-state piezo stack actuators), sensors, and the flexure-based guiding system, PI piezo nanopositioning stages can provide sub-nanometer positioning resolution. The name of this structure is influenced by its proximity to the liver the word hepatic comes from hpar, which means liver in Greek. high-dynamics system with minimum runout and clear aperture ultra-precision trajectory control, ideal for surface analysis and scanning microscopy enhanced responsiveness & multi-axis precision: parallel kinematics / metrology travel range 100 µm × 100 µm clear aperture 56 mm × 56 mm capacitive sensors for resolution <0. For the highest performance and optimized dynamics, a monolithic planar design (single module) with parallel kinematics and parallel metrology position feedback is recommended. The hepatic flexure, also known as the right colic flexure, is found in the digestive system of the human body and creates the bend in the colon that connects the ascending colon and the transverse colon. Wire EDM (Electric Discharge Machining) cut flexures provide the best guiding accuracy. XYZ Flexure Stage Clamp Set MDE154 Clamp set for. XY piezo stages can be designed in several ways. This thesis presents a family of XY flexure mechanisms with large ranges of motion, first-order decoupled degrees of freedom, and small parasitic error. Non-standard Component Plate for Elliot Gold Flexure Stages MDE153 Component plate that clamps to Elliot. In the recent years, more focus has been given to compliant or flexural mechanisms for improving the performance of such devices 11-13.
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